Plasmatherm Versaline DSE-III

Deep Silicon Etcher
Version: 4,6 and 8 inch
Vintage: 01.06.2012

Plasma-Therm Versaline DSE-III (Deep Silicon Etcher)
single chamber with single wafer semi-auto load lock
- Vintage 2012, sold “As-Is”, no warranty.
- Available for inspection before disassembly on July 30 th 2024.
- Last known condition: operational,
GUI PC and CTC PC in e-rack are not working.

Main specification (ask for details):
- Application: deep silicon etch
- Substrate size: 4”,6”,8”. Mechanical clamp
- 40C..+40C with Affinity chiller
- Semi-auto load lock, single wafer
- Plasma-Therm ICP-II DSE 3-turn source
- 3.5kW, 2MHz ICP RF package (5kW limited to 3.5kW)
- High-Speed Process Modulation w/
1-100kHz DBS RF package for DSE
- Heated chamber 180C
- Optical End Point Detection
- Gas box with 4 lines
(C4F8, SF6, Ar, O2. 400/600/50/50sccm)
- Fast gas switching option for DSE
- User terminal mobile cart
- Edwards ih80 dry pump
- Edwards xds35i load lock dry pump
- Edwards 1300l/s STPA turbo
- 380VAC 3 phase (with transformer)
- Low Maintenance Package
- Through-wall panel is not included