Plasmatherm SLR 770 ICP

Deep Silicon Etcher
Version: 4 inch
Vintage: 01.06.1998
Plasma-Therm SLR 770 ICP (Deep Silicon Etcher)
single chamber with single wafer semi-auto load lock
- Vintage 1998, sold “As-Is”, no warranty.
- Available for inspection before disassembly on
July 30 th 2024.
- Last known condition: operational,
one analog I/O box is not working.

Main specification (ask for details):
- Application: deep silicon etch
- Substrate size: 4”
- Semi-auto load lock, single wafer
- 1.0kW ICP RF package
(2kW generator limited to 1.0kW)
- 500W RF bias
- Gas box with 5 lines (CHF3, C4F8, SF6, Ar, O2)
- ThermoFlex 900 chiller
- Edwards ih80 dry pump
- Edwards nxds load lock dry pump
- Load lock small turbo pump Leybold
- Edwards STPA-1303CV turbo
- 380VAC 3 phase
- Through-wall installation package