Plasmatherm SLR-720

Ref : 2708150-9-W

Condition : Used

Manufacturer : Plasmatherm

Model : SLR-720

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

- Single chamber with load lock
- Currently configured for 4" wafers
- Can process up to 8"/200mm wafers (with proper tooling, available at additional cost)
- Turbo Pump
- AEI/RFPP RF5S 500W RF Generator
- Leybold Trivac D65BCS Vacuum Pump
- Leybold Trivac D25BCS Vacuum Pump
- Neslab HX-75 Recirculating Chiller
- Power Box
- Process Software
- Computer upgraded in 2011 by OEM / runs Win 98
- Set of Operation and Maintenance Manuals
- 4 MFCs:
*SF6
*N2
*CHF3
*O2

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