Plasmatherm SLR 720

Features
2 - 4 channel valve control PCB (for the nupro valves) • 1/8" tubing for the nupro valves (~40 ft) • Re-wiring of the valve control PCB connectors to support this up-fit, plugs, pins and wire as necessary • JVIC will need to move the N2 purge inlet connection to its new location (to support the addition of the 4 port manifold • MFCs will be cleaned and calibrated to Nitrogen for the following flow rates • (2) for the PECVD side of the system • Nitrogen – 2000 sccm • Argon – 500 sccm • (2) for the RIE side of the system • BCL3 - 50 sccm • Cl2 – 50 sccm