Plasmatherm 790 Reactive Ion Etcher

Manually Loaded Process Chamber with 8” (dia.) Cathode
Gas Distribution Panel with 4ea Gas Channels
MKS 1479 Metal Sealed Mass Flow Controllers
4ea Additional Gas Channels Available
RFPP RF5S RF Generator: 500W @ 13.56MHz
RFPP AMN-5 Auto Matching Network
RFPP AMNPS-2A Auto Matching Network Controller
Leybold TMP 361 Turbomolecular Pump
Leybold NT 150/360 Turbomolecular Pump Controller
EquipmentWorks 2.6 Application SW
Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,
16Gb RAM & 500GB SSD
All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
All SMC Pneumatic Valves Available from SMC USA
Standard 21” Flat Panel Monitor, Keyboard & Mouse
Edwards QDP40 Dry Roughing Pump
NESLAB HX-75 Chiller
Electrical Disconnect Box - 208V, 60Hz, 3 Ph
System Fully Refurbished & Ready for Demonstration
Guaranteed to Meet or Exceed OEM Specifications