Plasmatherm 790 ICP

Wafer Size Range
Minimum 50 mm
Maximum 200 mm
Controller Type PC Controller Type
High Vacuum Pump Leybold 361C
Roughing Pump Leybold D40BCS
RF Generator Model RFPP RF20M & RF5S
Automatch Text RFPP AM-20 & AM-5
Number of Gas Inputs Three Gas
Process Gases TBD
Other Information The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M
The bottom electrode is supplied 13.56 MHz RF at 500 Watts. RFPP Model RF5S

Refurbishment to Include:
Cleaning and recalibration of mass flow controllers.
Rebuilding of Leybold D40BCS prepped only with fomblin oil.
Rebuilding of Leybold 361C Turbo pump.
Cleaning of chamber and gas shower.