Plasma V55-G
Ref :
2216396-9-W
Condition :
Used
Manufacturer :
Plasma
Model :
V55-G
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
29 Jan. 2024
Vacuum chamber 340 x 400 x 450mm
Door with auto unlock feature after end of process
Microwave excitation 2.45GHz magnetron, maximum adjusted power 1200W
3 gas channels with Brooks MFC: N2, Ar, O2
Power req. 120/208v
Pfeiffer DUO65C vacuum pump with Fomblin oil (PFPE)
Pressure gauge: Baratron absolute transducer
PLC process controller with RS232
Other machines similar to Plasma V55-G
1
Tegal 901e Plasma Etch
Location :
AMERICA North (USA-Canada-Mexico)
Year(s) :
1995
1
Agilent 7500A ICP-MS
Location :
EUROPE (Western and Northern)
Year(s) :
2010
1
2 Oxford Plasmalab 80 Plus PECVD tools
Location :
EUROPE (Western and Northern)