Nova T600 MMSR

Ellipsometer for CD and thin film measurements
Version: 300 mm
Vintage: 01.01.2018
Nova Instruments T600 Multi-Measurement Spectral Reflectometry system for immediate sale.
Still installed in the fab as shown in the photos.
Can be inspected by appointment.
The tool has a CE mark certificate.
Fitted with qty 3 x 300 mm FOUPs.
Electricity supply: 208V 3 phase 4 wire, 50-60 Hz, 20 A, 15KVA
Largest load: 32A SCCR 10KA
Weight: 2000 KG
Designed for use at 1Xnm tech node.
multi-channel configuration features normal and
oblique incidence spectroscopic reflectometry.
Optimized for best sensitivity on small features and
measurement of high-aspect-ratio structures.
NovaMARS modeling software.
Does critical dimensions (CD) and thin films measurements
provides wide spectral information for
best metrology performance
Optimized automatic Channel selection –
For enhanced performance, productivity and time-to-solution
Reliable, proven system architecture
Low variability and good tool-to-tool matching
For measuring on complex layer stacks and 3D structures.