Matrix

Matrix 105 Asher

*Model 105
*Configured for up to 6" wafers
*Single wafer, single cassette
*Independent control of pressure, RF power, temperature, gas flow, & substrate position
*Multi-step program (three steps + over etch) process program
*"Butterfly" Valve for more precise pressure control.
*Phase magnitude detector to provide real-time RF impedance matching control.
*Two Mass Flow Controllers
*Vacuum Hose Assembly
*Range for Strip:
*Range for Descum:
Inventory Number: 51168