Matrix

Matrix 105 Asher

The Matrix System One Model 105 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper, setup for 4" - 6" wafers.

*Configured for up to 6" wafers
*Single wafer, single cassette
*Independent control of pressure, RF power, temperature, gas flow, & substrate position
*600W RF water cooled generator
*Multi-step program (three steps + over etch) process program
*"Butterfly" Valve for more precise pressure control.
*Phase magnitude detector to provide real-time RF impedance matching control.
*Two Mass Flow Controllers
*Vacuum Hose Assembly
*Range for Strip: 150C to 250C +/-5C
*Range for Descum: 70C to 150C +/-5C
*Wafer Lift Pin Assembly (up and down)