LAM

Ref : 1831110-9-GO

Condition : Used

Manufacturer : LAM

Model : -

Year(s) : -

Quantity : 0

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 07 Jun. 2018

LAM 590 Etchers

* Fully automated microprocessor control
* High-throughput vacuum loadlocked
* Stepper motors
* Programmable, variable electrode spacing
* End point detection
* Cassette to cassette
* Can accomodate 3" to 6" wafers
* Five gas channel maximum

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