LAM TCP 9600SE

Ref : 2019408-9-GO

Condition : Used

Manufacturer : LAM

Model : TCP 9600SE

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 26 Nov. 2019

Standard recipe600/601 for AI etching:
Etch rate: 800 nm/min,
Photoresist etch rate:400nm/min,
Standard recipe 640 for AI203 etching:
Etch rate: 100-120nm/min
Substrate size:
150 mm diameter
Allowed Materials:
AI, AI203, Ti02, poly Si, Nb and a variety of nitrides may be etched using CI-chemistry
Forbidden Materials:

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