OAI 806 MBA NUV 4" Mask Aligner
AMERICA North (USA-Canada-Mexico)
OAI Model 806 MBA NUV 4" Mask Aligner is a four-camera,
manual, optical backside mask aligner system that is designed
to greatly surpass the performance of IR backside aligners.
Provides full optical backside alignment and is ideal for use in
R&D labs, universities, and low volume production.
Built on an anti-vibration table, the fixed mask holder
assembly virtually guarantees alignment accuracy and
repeatability. Using the Model 806 MBA is a simple process,
as all functions are controlled via the easy to read LCD screens.
Currently configured with 4" wafer chuck.
500 watt NUV lamp housing with 365-440nm mirrors.
Sub-micron level-to-level alignment.
High efficiency, uniform exposure system
Intensity controlled power supply.
User definable operational parameters.
Modular design. Motorized backside focus.
Dual video cameras with LCD screens.
Very versatile, front/backside optical alignment system.
SYSTEM NO LONGER SUPPORTED BY OAI.
We will fully test the system and make sure it is in
good working condition at time of sale.