Lam Research 2300 FLEX45

Wafer Size: 12inch
FLEX 45 (23F450455(F104683-PM2)) / 2007
RF Match: 853-040482-301
Pendulum Valve: Missing
TMP: EDWARDS STP-A2203C3
Pendulum Valve: 65048-PH52-ADR1 Type : 229351
Manometer
CM1: E28D-30653 Range 0.1Torr
CM2: 625A-14059 Range 10Torr
CM3: 625A-14059 Range 10Torr
AC Enclosure: 853-800083-442
Anapaizer Board: 778-900046-405
DC Enclosure Power Supply: 853-800087-404
VME Enclosure: 853-042958-052
CPU VME 7671: 605-048878-001
Lon Control B/D: 605-707109-012
VIOP B/D Step Driver: 810-099175-011
Lonworks Ip Server: 685-042168-002
RF FEED LINE: Yes
ESC: 839-800327-432
ESC Power Supply: Yes
OES: 685-801852-005
OES Cable: Yes
Noad Board 1: Yes
Noad Board 2: Yes
Noad Board 3: Yes
Helium MFC: Yes
Photon Controller: Yes
Capacitor Control B/D: Yes
Interlock Board: Yes
2Mhz 5000Watt Generator: Yes
27Mhz 3000Watt Generator: 660-002294-002
60Mhz 2500Watt Generator: 685-002302-002
TMP Controller: SCU-1600

FLEX 45 (23F450456(F104683-PM3)) / 2007
RF Match: 853-040482-301
Pendulum Valve: Missing
TMP: EDWARDS STP-A2203C3
Pendulum Valve: 65048-PH52-ADR1 Type : 229351 Manometer
CM1: E28D-30653 Range 0.1Torr CM2: 625A-14059 Range 10Torr CM3: 625A-14059 Range 10Torr
AC Enclosure: 853-800083-442
Anapaizer Board: 778-900046-405
DC Enclosure Power Supply: 853-800087-404 VME Enclosure: 853-042958-052
CPU VME 7671: 605-048878-001
Lon Control B/D: 605-707109-012 VIOP B/D Step Driver: 810-099175-011
Lonworks Ip Server: 685-042168-002 RF FEED LINE: Yes
ESC: 839-800327-432
ESC Power Supply: Yes OES: 685-801852-005
OES Cable: Yes Noad Board 1: Yes Noad Board 2: Yes Noad Board 3: Yes Helium MFC: Yes
Photon Controller: Yes Capacitor Control B/D: Yes Interlock Board: Yes
2Mhz 5000Watt Generator: Yes
27Mhz 3000Watt Generator: 660-002294-002 60Mhz 2500Watt Generator: 685-002302-002 TMP Controller: SCU-1600

FLEX 45 (23F450457(F104683-PM4)) / 2007
RF Match: 853-040482-301
Pendulum Valve: Missing
TMP: EDWARDS STP-A2203C3
Pendulum Valve: 65048-PH52-ADR1 Type : 229351 Manometer
CM1: E28D-30653 Range 0.1Torr CM2: 625A-14059 Range 10Torr CM3: 625A-14059 Range 10Torr
AC Enclosure: 853-800083-442
Anapaizer Board: 778-900046-405
DC Enclosure Power Supply: 853-800087-404 VME Enclosure: 853-042958-052
CPU VME 7671: 605-048878-001
Lon Control B/D: 605-707109-012 VIOP B/D Step Driver: 810-099175-011
Lonworks Ip Server: 685-042168-002 RF FEED LINE: Yes
ESC: 839-800327-432
ESC Power Supply: Yes OES: 685-801852-005
OES Cable: Yes Noad Board 1: Yes Noad Board 2: Yes Noad Board 3: Yes Helium MFC: Yes
Photon Controller: Yes Capacitor Control B/D: Yes Interlock Board: Yes
2Mhz 5000Watt Generator: Yes
27Mhz 3000Watt Generator: 660-002294-002 60Mhz 2500Watt Generator: 685-002302-002 TMP Controller: SCU-1600

EFEM: V2
ATM Robot: Brooks(151864CUR) Aligner: Yes
Buffer: Yes
Cool station: Yes Pump: Missing Terminal Server: Yes
OHT & Sensor Node B/D: Yes AGV Node Board: Yes Ethernet Server: Yes
Front UI Panel: Yes Name Plate: Yes

AC Rack: V2
ATM Robot Controller: Brooks(175789R) UPS Power Supply: Yes
Main PC: Yes (HDD Missing) Monitor: Yes
Circuit Breaker: Yes

Load Port: V2 (002-7200-29 , 32)
Maker: Brooks
LP1: Yes, LP2: Yes, LP3:Yes

VTM: V2
L-VAT Door: AL1, AL2(07512-UA24-ADI2)
Angle Valve: AL1, AL2, TM(MKS) Pressure Gauge: AL1, AL2, TM
Rocker Valve: AL1, AL2, PM2, PM3, PM4 VTM ROBOT: Magnatran7(003-1600-37)
Solenoid Valve: Yes VTM Mother B/D: Yes Node N/D: Yes
Super Slot B/D: Yes

GIB Gas Box: V2 (IGS Type) Damper: Yes
FIB: No
Gas Line:
PM2: 571-033051-12535B1, Gas Line: 12 PM3: 571-033051-12535C1, Gas Line: 12 PM4: 571-033051-12535D1, Gas Line: 12

Missing Parts: HDD, EFEM Pump