LAM 9600

Ref : 2257608-9-MT

Condition : Used

Manufacturer : LAM

Model : 9600

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 17 May. 2024

Mounting Bulkhead
Wafer Size 200 MM
Software Envision 1.52
Indexers HINE
AC Box -001
Gas Box Orbital Welded
Clamping ESC
Backside Helium Closed Loop
Generator 3 RFG 1250
RF Match Upper TCP, Lower Mini Match, DSQ Match
Turbo SEKO SEKI 1000L
Turbo Controller SEKI SEKI STP
VAT Gate VAT 65
VAT Controller PM-7
Endpoint Dual Endpoint 703nm and 520nm
DSQ Hinged
WVDS Auto Fill
APM Standard
MFCs Unit 1660

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