LAM 2300 Exelan Flex
Ref :
255099
Condition :
Used
Manufacturer :
LAM
Model :
2300 Exelan Flex
Year(s) :
2006
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 300 mm
Fab Section Etch
General Product Information
Vendor Supplier LAM
Model 2300 Exelan Flex
Vintage 2006
Process Oxide ETCH
Hardware Confguration (Fab)
Handler System ATM & VTM robot 1
Main System Main Tool 1
Factory Interface FOUP 3
Hardware Confguration (Subfab / Auxilliary Units)
RF RACK 1
AC RACK 1
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