KLA-Tencor Surfscan SP2 Unpatterned Surface Inspection System

KLA-TENCOR SURFSCAN SP2 UNPATTERNED SURFACE INSPECTION SYSTEM
consisting of:
- Model: SP2 with 200mm Open & 300mm FOUP/FIMS Handler (other handlers available)
- Currently Configured for 200/300mm Wafers
- Unpatterned Surface Inspection System
- Vintage 2006

KLA-TENCOR SURFSCAN SP2 REFURBISHMENT PROCESS consists of:
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or
replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment