KLA-Tencor Surfscan 6420
Ref :
2702890-9-CP
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
Surfscan 6420
Year(s) :
1996
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Automatic Surface Inspection System
Condition Very Good
Power Requirements 200-240 V 50 Hz
CE Marked YES
Exterior Dimensions
Width 29.921 in (76.0 cm)
Depth 40.945 in (104.0 cm)
Height 66.142 in (168.0 cm)
Weight 728 lb (330 kg)
›Automatic Surface Inspection System
›Bare Wafer Surface Defect Inspection System
›Substrate/Sizes: 6" and 8" Wafer Capable
›Thickness: SEMI Standard Wafer Thickness
›Throughput: 100 wph (200 mm) at 0.12 mm
›Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
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