KLA-Tencor Surfscan 6420

Capable of 2" - 8" wafers
Low angle optics
Non-Patterned surface Inspection System
0.10 micron Defect Sensitivity @ 95% capture
0.02 ppm Haze Sensitivity
Accuracy within 1%
REFURBISHMENT PROCESS AS FOLLOWS:
Install New Laser
Clean or Replace Optics and Mirrors
Refurbish Load Arm and Lead Screw
Refurbish Cassette Elevators and Re-Anodize Plates
Refurbish All Wiring or Replace
Refurbish All Switches or Replace
Refurbish Monitor or Replace
System refurbished to meet OEM Specification
System is completely refurbished

The KLA Tencor Surfscan 6420 is
a cutting-edge semiconductor wafer inspection system that
plays a pivotal role in upholding the
quality and reliability of integrated circuits used in
electronic devices.

The Surfscan 6420, developed by KLA Tencor,
is specifically designed to detect and categorize defects on
semiconductor wafers, enabling manufacturers to identify and
rectify potential issues early in the production process.

KEY FEATURES OF THE SURFSCAN 6420
High-Resolution Imaging:
The system captures high-resolution images of
the wafer surface to detect even the tiniest defects.

Multi-Angle Darkfield Inspection:
It performs multi-angle darkfield inspection to
enhance defect detection sensitivity.

Automated Defect Classification:
Advanced machine learning algorithms
automatically classify defects based on their size,
shape, and location.

BENEFITS OF THE SURFSCAN 6420
Improved Yield and Quality Control:
Early defect detection leads to
higher yield rates and improved overall quality control.

Enhanced Process Monitoring:
Real-time monitoring of wafer quality minimizes the
risk of yield losses caused by process deviations.

Cost Savings:
Catching defects early reduces production costs and
improves profitability.


APPLICATIONS OF THE SURFSCAN 6420
The system is widely used in memory device manufacturing,
logic device manufacturing, and
advanced packaging within the semiconductor industry.

INDUSTRY IMPACT AND FUTURE PROSPECTS
The Surfscan 6420 has significantly improved yield rates,
product quality, and manufacturing costs in
the semiconductor industry.
Future iterations are expected to
offer even more advanced features to
meet evolving industry needs.