KLA-Tencor Surfscan 6200

Bare Wafer Surface Defect Inspection System
Max Wafer Capable: 8”/200mm
System configured for 8“/200mm wafers
Defect Sensitivity: 0.12um
Defect Map and Histogram with Zoom
Haze Map and Histogram with Zoom
Argon Ion Laser (488nm)
2D Signal Integration

Software:
Microsoft Windows 98, Version 4.2
Software Enhancement
Computer Upgrade
Pentium Computer
Software Capable for Wafer Map and Histogram
Parallel Printer Port
Blower Box
SECS II Communication Port
Operations Manual and Documentation
Power Supply will fit to the Customer Location
One backup hard drive supplied to customer
6 Month Warranty on Parts and Labor
(Laser warranty is 6 months or
5000 hours whichever comes first,
Puck is not covered under warranty)

Note: If calibration wafers are required,
please inform the size and type needed,
and they will be quoted separately

CONDITION
Replace used Laser with New Laser
Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
Replace used Power Supply, as required
Replacement or repair of any bad Circuit Board
Mechanical assemblies cleaned, lubricated,
rebuilt, or replaced as needed
Optics assemblies cleaned and aligned to
meet performance specs or replaced as needed
Electronic assemblies tested to
meet performance specifications or replaced as needed
Puck assembly rebuilt or replaced (if applicable)
Calibrate system using calibration wafers
Machine covers are cleaned, polished, or replaced, as needed
System transport locks installed; system prepared for shipment
Refurbishment carried out by KLA-Tencor Trained Technicians
Windows OS
Excellent Condition Guaranteed.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.