KLA-Tencor Surfscan 5500

Model 5500 Main System
Can handle from 2" up to 8"/200mm wafers
Submicron sensitivity, detects 0.2 micron particles
Surface haze detected as low as 0.3 ppm.
Handles high scattering surfaces such as metals,
polysilicon and cvd films.
Map locations and size available for each particle.
Fully refurbished to meet original Surfscan 5500 specifications
Operations Manual for KLA Surfscan 5500

Refurbished to Factory Specifications consisting of:
New Laser
New Belts
Clean or Replace Optics and Mirrors
System calibrated to KLA specifications with
NIST Calibration Standard
Optics Alignment
Indexer sensor replacement
Vacuum line change out
New 17" LCD Monitor