KLA-Tencor SP1 TBI Unpatterned Surface Inspection System

KLA-TENCOR SP1 TBI UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:
- Model: SP1 TBI
- Up to 300mm Wafers
- Inquire about Handler Options for Various Size Wafers
- Unpatterned Surface Inspection System
- Wafer Measurement Module
- Triple Beam Illumination (TBI)
- Normal Illumination- 0.079 Defect Sensitivity
- Oblique Illumination- 0.060 Defect Sensitivity
- 0.005 ppm Haze Sensitivity
- Ar Ion Laser (488 nm)
- RTDC (Real Time Defect Classification
- Measurement Chamber with ULPA filter and Blower Unit
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Software Version 4.1
- Security, Logging and Native Networking as provided by Windows NT
- Interactive Pointing Device, Key Pad Controls
- TFT Flat Panel Display
- Parallel Printer Port
- Defect Map and Histogram with Zoom
- Micro View Measurement Capability
- Blower Box

KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs,
as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance
specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or
replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment

Condition:
Refurbished
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.