KLA-Tencor P-15

Wafer Size 8"
Vintage 2002-8
Tool's Condition Excellent
- Long Scan Profiler P-15 Measurement.
- Micro Head II SR
- Stylus Tip (Green): 2um radius
- Measurement Range: 13㎛,65㎛,327㎛.
- Scan Length: 205mm.
- Scan Speed : 1㎛ ~ 25 mm/sec.
- Stylus Force: 1 ~50mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Pentium III 733MHz, Ram 256MB & 19" LCD Color Monitor,
Windows NT 4.0
- S/W Version : 6.41
- Utility: Vacuum.
- Power: 220V/50HZ, 4A.
- Installed in Clean-room.
- Can demonstrate any time.