KLA-Tencor OP5240I

Ref : 254148

Condition : Used

Manufacturer : KLA-Tencor

Model : OP5240I

Year(s) : 1999

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Metrology

General Product Information
Vendor Supplier KLA
Model OP5240I
Vintage 1999
Asset Description FMTK-AP6-T
THERMAWAVE_5240I_FILM THK
MEAS (former EFLM-03)FMTKAF6(Ex-OPTI-12)
Software Version TFMS-NT V2.3.R2
CIM SECS
Process Flim thickness

Hardware Confguration (Fab)
Handler System Robot & Aligner 1 OK
Factory Interface SMIF 2 OK
Main System Main body 1 OK

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