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KLA-Tencor OP5240I
Ref :
254148
Condition :
Used
Manufacturer :
KLA-Tencor
Model :
OP5240I
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 200 mm
Fab Section Metrology
General Product Information
Vendor Supplier KLA
Model OP5240I
Vintage 1999
Asset Description FMTK-AP6-T
THERMAWAVE_5240I_FILM THK
MEAS (former EFLM-03)FMTKAF6(Ex-OPTI-12)
Software Version TFMS-NT V2.3.R2
CIM SECS
Process Flim thickness
Hardware Confguration (Fab)
Handler System Robot & Aligner 1 OK
Factory Interface SMIF 2 OK
Main System Main body 1 OK
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