KLA-Tencor LDS 3000 M/Smif Macro Inspection Waf. Tool 6-8"

Ref : 280462-9-W

Condition : Used

Manufacturer : KLA-Tencor

Model : LDS 3000 M/Smif Macro Inspection Waf. Tool 6-8"

Year(s) : 2006

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Last check : 21 Jul. 2011

- LDS 3000 M/Smif, 6 and 8" capable
- 1x smif Indexer INX2150 (6") and 1x smif Indexer INX2200 (8")
- UV-option
- OCR Reader Lkx5 (front)
- EBR (Edge Bead Removal)
- Spot Check Software
- Defect Standard Wafer 200mm
- VISCONT NT ADR Bassic
- Memory Extension

Remark: The machine has to be repaired because of handling problem (arm bend); so this has to be repaired by KLA (cost approx 25k$)

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