KLA-Tencor LDS 3000 M/Smif Macro Inspection Waf. Tool 6-8"

- LDS 3000 M/Smif, 6 and 8" capable
- 1x smif Indexer INX2150 (6") and 1x smif Indexer INX2200 (8")
- UV-option
- OCR Reader Lkx5 (front)
- EBR (Edge Bead Removal)
- Spot Check Software
- Defect Standard Wafer 200mm
- VISCONT NT ADR Bassic
- Memory Extension

Remark: The machine has to be repaired because of handling problem (arm bend); so this has to be repaired by KLA (cost approx 25k$)