KLA-Tencor Archer A500 LCM

Wafer Size 300 mm
Fab Section Metrology

General Product Information
Vendor Supplier KLA
Model Archer A500 LCM
Vintage 2014
Asset Description OVL2202-T-KLA-TENCOR ARCHER
500 (MT)
Software Version 16.12.00.30400
CIM SECS/GEM
Process Overlay

Hardware Confguration (Fab)
Factory Interface SMIF 1
Others uAIM Measurement Capability 1
Options System Blossom Data Option 1
Others Multi-Location Target 1
Others Variable Illumination Spectrum 1
Main System A500 LCM 1
Handler System Phoenix 300MM LCM Triple Handler 1
Options System CMP 200 Measurement Option 1
Options System AlMid Option 1
Others Enhanced MAM 1