KLA-Tencor Alpha Step 200

- Routinely measures step heights and surface profiles below 200A
- A single button automatically initiates scanning,
leveling and display of scaled profile
- Measures up to 150mm wafers with 360 degree rotation
- Date is stored in computer memory
- Stylys force continously monitored and displayed
- Built-in thermal screen-image printer
- Vertical measurement ranges +/- 160kA or +/- 160um
- Horizontal measurements ranges up to 10,000um max
- Resolution : Vertical - 5mm +/- 160um (5A +/- 160kA)
Horizontal - 400A
- Digital conversion rate : 50 samles / Sec
- Stylus Radius : 12.5um or 5 um (standard)
- Stylus tracking force : Adjustable 1~25mg

- Sample stage movement : X axis (4"), Y axis (3.2"), Z axis (0.9")