KLA-Tencor AIT FUSION (AIT XP+)

Wafer Size 8"
Vintage 2000-10
. Wafer size : 200mm
. CE marked
. Single open cssette handler
. Image Computer
. OS : Microsoft Windows NT 4.0
. Application S/W : Version 6.3.24.3 ( Build Time 2006.8 )
. Laser: 75mW 488nm argon ion laser
. (3) Collection Channels
. Spot Size 7um, 5um, 3.5um
. Internal Microscope Review
- Microscope review Objectives 10x, 50x, 100x, 150x
- Bright / Dark Field View
- AutoFocus Capability
. Brooks Robot and pre aligner
. Blower Unit
. KLARF Output File

Facility Requirements:
- CDA : 1/4" , min 90psi
- Vacuum : 1/4" 20-in Hg
- Power
. (Main): 208VAC, 3-Phase, 4-Wire, Freq 50/60Hz
. (Image computer): 208VAC, 3-Phase, -4 Wire, Freq 50/60Hz

*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.