KLA SPECTRACD-XT

Ref : 2696152-9-FM

Condition : Used

Manufacturer : KLA

Model : SPECTRACD-XT

Year(s) : 2010

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 300 mm
Fab Section Metrology

General Product Information
Vendor Supplier KLA-TENCOR
Model SPECTRACD-XT
Asset Description OCD Measurement Tool
Software Version 050032
CIM SECGEM
Process OCD Measurement

Hardware Confguration (Fab)
Main System Handler System Phoenix Transporter 2 1 OK
Main System MainFrame 1 OK
Factory Interface FOUP 1 OK

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