Hitachi 8840
Ref :
2659257-9-FM
Condition :
Used
Manufacturer :
Hitachi
Model :
8840
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Lithography
General Product Information
Vendor Supplier HITACHI
Model 8840
Vintage 1999
Asset Description PEA807 HITACHI S8820 CDSEM-08
Software Version 9.25
CIM secs/gem
Process CD measurement
Hardware Confguration (Fab)
Main System main tool 1 OK
Factory Interface SMIF 2 OK
Options System
Hardware Confguration (Subfab / Auxilliary Units)
Transformer 1 OK
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