Ebara EPO-222

Ref : 254160

Condition : Used

Manufacturer : Ebara

Model : EPO-222

Year(s) : 2000

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section CMP

General Product Information
Asset Description Ebara 222 Oxide CMP-STI
Software Version VME3.13.31/TouchPanel3.5.14
CIM SECS/GEM
Process Oxide ILD/IMD CMP

Hardware Confguration (Fab)
Main System PolishingCleaningUnit 2 OK
Handler System RobotsRorze 2 OK
Factory Interface SMIF 2 OK

Other machines similar to Ebara EPO-222

1 Ebara EPO-222

Location : United States (USA)

Year(s) : 2000

1 HMI Escan380

Location : United States (USA)

Year(s) : 2006

1 Ebara FREX300

Location : ASIA (North East)

Year(s) : 2003

1 KLA SPECTRACD-XT

Location : United States (USA)

Year(s) : 2010