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HMI Escan380
Ref :
2658145-9-FM
Condition :
Used
Manufacturer :
HMI
Model :
Escan380
Year(s) :
2006
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Tool ID YEBI731 (F7 YEBI703)
Tool Status Connected
Wafer Size 300 mm
Fab Section Defect Detection
General Product Information
Vendor Supplier HMI
Model ESCAN380
Asset Description YEBI731
Software Version NA
CIM SECS.GEM
Process EBEAM INSPECTION
Hardware Confguration (Fab)
Factory Interface FOUP 2 OK
Hardware Confguration (Subfab / Auxilliary Units)
Ebara AA30 Dry Pump1 OK
Line Conditioner 1 OK
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