HMI Escan380

Ref : 2658145-9-FM

Condition : Used

Manufacturer : HMI

Model : Escan380

Year(s) : 2006

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Tool ID YEBI731 (F7 YEBI703)
Tool Status Connected
Wafer Size 300 mm
Fab Section Defect Detection

General Product Information
Vendor Supplier HMI
Model ESCAN380
Asset Description YEBI731
Software Version NA
CIM SECS.GEM
Process EBEAM INSPECTION

Hardware Confguration (Fab)
Factory Interface FOUP 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
Ebara AA30 Dry Pump1 OK
Line Conditioner 1 OK

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