HMI Escan380

Ref : 251081

Condition : Used

Manufacturer : HMI

Model : Escan380

Year(s) : 2006

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Tool ID YEBI731 (F7 YEBI703)
Tool Status Connected
Wafer Size 300 mm
Fab Section Defect Detection

General Product Information
Vendor Supplier HMI
Model ESCAN380
Asset Description YEBI731
Software Version NA
CIM SECS.GEM
Process EBEAM INSPECTION

Hardware Confguration (Fab)
Factory Interface FOUP 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
Ebara AA30 Dry Pump1 OK
Line Conditioner 1 OK

Other machines similar to HMI Escan380

1 HMI eScan 500

Location : United States (USA)

Year(s) : 2014

1 Karl Suss MA 4

Location : AMERICA North (USA-Canada-Mexico)

1 Napson NAP-NC-80MAP(RS)

Location : ASIA (North East)

Year(s) : 2012

1 KLA MIS-200

Location : EUROPE (Western and Northern)