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HMI Escan380

Ref : 251081
Condition : Used
Manufacturer : HMI
Model : Escan380
Year(s) : 2006
Quantity : 1
Location : Seller or machines location:
United States (USA)
Last check : 26 Feb. 2025

Tool ID YEBI731 (F7 YEBI703)
Tool Status Connected
Wafer Size 300 mm
Fab Section Defect Detection

General Product Information
Vendor Supplier HMI
Model ESCAN380
Asset Description YEBI731
Software Version NA
CIM SECS.GEM
Process EBEAM INSPECTION

Hardware Confguration (Fab)
Factory Interface FOUP 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
Ebara AA30 Dry Pump1 OK
Line Conditioner 1 OK

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