CFM FullFlow 1/99 8100

Ref : 254198

Condition : Used

Manufacturer : CFM

Model : FullFlow 1/99 8100

Year(s) : 1999

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Clean

General Product Information
Vendor Supplier CFM
Model FullFlow 1/99 8100
Vintage 1999
Asset Description 8100 HP & Sulfuric Ozone CFM
Software Version 4.11.11.1
CIM SECS
Process HP & Sulfuric Ozone

Hardware Confguration (Fab)
Main System CFM Software 1 OK
Handler System Faith Rapitran 1 OK
Factory Interface Open Cassette 1 OK

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