CFM FullFlow 1/99 8100
Ref :
254197
Condition :
Used
Manufacturer :
CFM
Model :
FullFlow 1/99 8100
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 200 mm
Fab Section Clean
General Product Information
Vendor Supplier CFM
Model FullFlow 1/99 8100
Vintage 1999
Asset Description 8100 HP & Sulfuric Ozone CFM
Software Version 04.11.11.1
CIM SECS
Process HP & Sulfuric Ozone
Hardware Confguration (Fab)
Main System CFM Software 1 OK
Factory Interface Open Cassette 1 OK
Handler System Faith Rapitran 1 OK
Missing/Faulty Parts / Accesorries List
Upper Transition 1
Carrier 1
Computer 1
Lower Transition 1
Transfer Motherboard 2
Transfer Motherboard 1
Tool Pictures
General 8100 CFM
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