CFM FullFlow 1/99 8100

Wafer Size 200 mm
Fab Section Clean

General Product Information
Vendor Supplier CFM
Model FullFlow 1/99 8100
Vintage 1999
Asset Description 8100 HP & Sulfuric Ozone CFM
Software Version 04.11.11.1
CIM SECS
Process HP & Sulfuric Ozone

Hardware Confguration (Fab)
Main System CFM Software 1 OK
Factory Interface Open Cassette 1 OK
Handler System Faith Rapitran 1 OK

Missing/Faulty Parts / Accesorries List
Upper Transition 1
Carrier 1
Computer 1
Lower Transition 1
Transfer Motherboard 2
Transfer Motherboard 1

Tool Pictures
General 8100 CFM