ASML PAS 5500 / 200B
Ref :
2659254-9-FM
Condition :
Used
Manufacturer :
ASML
Model :
PAS 5500 / 200B
Year(s) :
1997
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Tool ID ASTEP-38
Tool Status Connected
Wafer Size 200 mm
Fab Section Lithography
General Product Information
Vendor Supplier ASML
Model PAS 5500 / 200B
Vintage 1997
Asset Description AUTOMATIC WAFER STEPPER
Software Version 8.8.6.c
CIM SECS
Process ILINE STEPPER
Hardware Confguration (Fab)
Main System MAIN BODY OK
Handler System Wafer Transfer Unit OK
Factory Interface NONE
Options System ELECTRONIC CABINET 1 OK
Others Operator Console Unit OK
Hardware Confguration (Subfab / Auxilliary Units)
ADVANCE ALIGNMENT SYSTEM 1
POWER TRANSFORMER 1
C&T CABINET 1
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