ASML PAS 5500 / 200B

Tool ID ASTEP-38
Tool Status Connected
Wafer Size 200 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model PAS 5500 / 200B
Vintage 1997
Asset Description AUTOMATIC WAFER STEPPER
Software Version 8.8.6.c
CIM SECS
Process ILINE STEPPER

Hardware Confguration (Fab)
Main System MAIN BODY OK
Handler System Wafer Transfer Unit OK
Factory Interface NONE
Options System ELECTRONIC CABINET 1 OK
Others Operator Console Unit OK

Hardware Confguration (Subfab / Auxilliary Units)
ADVANCE ALIGNMENT SYSTEM 1
POWER TRANSFORMER 1
C&T CABINET 1