Applied 20

WAFER SPECIFICATION
Wafer Size 150mm

SYSTEM CONFIGURATION CHAMBER A
CHAMBER B
CHAMBER C
CHAMBER D

3-1. CHAMBER A
RF Generator OEM-12B
RF Match
Baratron 10 und 1000 Torr
DPA
Throttle Valve
Slit Valve Chemraz bonded
Lift pin
Process kit

-2. CHAMBER B
RF Generator OEM-12B
RF Match
Baratron 10 und 1000 Torr
DPA
Throttle Valve
Slit Valve Chemraz bonded
Lift pin
Process kit

3-3. CHAMBER C
RF Generator OEM-12B
RF Match
Baratron 10 und 1000 Torr
DPA
Throttle Valve
Slit Valve Chemraz bonded
Lift pin
Process kit

3-4. CHAMBER D
RF Generator OEM-12B
RF Match
Baratron 10 und 1000 Torr
DPA
Throttle Valve
Slit Valve Chemraz bonded
Lift pin
Process kit


4. ELECTRICAL REQUIREMENTS
Line Frequency 50/60 Hz
Line Voltage 200/208V
Line Amperage 180AMPS
FACILITY UPS INTERFACE

5. SYSTEM MONITOR

1st Mnitor
2nd Mnitor

6. MAINFRAME

Mainframe Type STANDARD
Robot Type MKII
Loadlock Cassette MANUAL 2 CASSETTE
Flowswitch SMC
Storage Elevator 15 Slot
Power Rack STANDARD