AMAT Producer GT

Wafer Size 300 mm
Fab Section Thin Film

General Product Information
Vendor Supplier AMAT
Model PECVD Producer GT BDII ---- 3ch -
CHA-BCHD, CHB-BCHD, CHC-BCHD
Vintage 2014
Asset Description CVD85x, underutilized at FAB8, used for old techs
Software Version B4361_gB8.00_24
CIM SECS/GEM
Process TFM_U-LowK Dielectric

Hardware Confguration (Fab)
Main System Producer GT PECVD, 3CHM BCHD 1 OK
Handler System Standard Automation and Software 1 OK
Options System