AMAT P5000 MARK II

Wafer Size 200 mm
Fab Section Thin Film

General Product Information
Vendor Supplier AMAT
Model P5000 MARK II
Vintage 1996
Asset Description PEA552
Software Version E5.01C
CIM SECS
Process ILD

Hardware Confguration (Fab)
Main System Mainframe 1 OK
Handler System LL 1 OK
Factory Interface NONE OK
Options System process chamber 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
DTLR 3 OK
RF Generator 2 OK
RF Match 2 OK
Heat Exchanger 1 OK

Missing/Faulty Parts / Accesorries List
ozone analyser 1
RF Match 1
Ozone Generator 3
Pump 4
chamber 1