AMAT Centura

Wafer Size 300 mm
Fab Section Etch

General Product Information
Vendor Supplier AMAT
Model CENTURA - (2+1+1)CH
Vintage 2011
Asset Description ETX29x, underutilized at FAB8, used
for old techs (32nm)
Software Version B2.870_gB7.50_37
CIM SECS/GEM
Process OBAN_GateEtch

Hardware Confguration (Fab)
Main System AMAT CENTURA OBAN_GateEtch 1 OK
Handler System Standard Automation and Software 1 OK
Factory Interface FOUP 3 OK