AMAT 5200 Centura 1

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier AME
Model AMAT 5200 Centura 1
Vintage 1999

Asset Description AMAT 52000 IPS
Software Version E4826
CIM SECS, GEM
Process MC IPS

Hardware Confguration (Fab)
Handler System Mono Arm Brooks Handler 1 OK
Main System Transfer Module 1 OK
Main System IPS Chambers 2 OK
Factory Interface Open Cassette 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
RF Rack 1 OK
Turbo Controller Rack 1 OK
Power Distribution/ Electronics Rack 1 OK