AMAT 5200 Centura 1

Ref : 255103

Condition : Used

Manufacturer : AMAT

Model : 5200 Centura 1

Year(s) : 1999

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Etch

General Product Information
Vendor Supplier AME
Model AMAT 5200 Centura 1
Vintage 1999

Asset Description AMAT 52000 IPS
Software Version E4826
CIM SECS, GEM
Process MC IPS

Hardware Confguration (Fab)
Handler System Mono Arm Brooks Handler 1 OK
Main System Transfer Module 1 OK
Main System IPS Chambers 2 OK
Factory Interface Open Cassette 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
RF Rack 1 OK
Turbo Controller Rack 1 OK
Power Distribution/ Electronics Rack 1 OK

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