Yield Engineering Systems (YES) LP6 HMDS

Microprocessor control of output with input monitoring
Multi-programming capabilities
Process interrupt indicator (‘ABORT’)
Process indicator lights
Cycle complete light and sonalert
Electropolished 316 stainless steel chamber
Internal chamber welds
Two independent overtemperature safety switches
Preheated nitrogen
Front loading HMDS vacuum safe holding one quart size chemical bottle
Clearance for robotic pickup of cassettes
Audible alarm override switch
Nitrogen surge control valve
24 VAC instrumentation
Infrared HMDS level sensor with low level indicator