Yield Engineering Systems (YES) 6112R

Maximum Temperature 200 ºC (392 ºF, 473 ºK)
Heat/Cool Controls
Control Type Programmable
Overtemperature Protection YES
Controller Manufacturer/Model LARK / I.S.P.C
Capacity/Volume Box 3.50 cu ft (0.10 cu m)
Chamber Size
Width 20.00 in (50.80 cm)
Depth 15.12 in (38.40 cm)
Height 20.00 in (50.80 cm)
Chamber Characteristics
Chamber Construction Electropolished 316 Stainless Steel
Accessories
Ramp option
1 Optional 27" high Stainless steel table $350.00 see photo #3
Other Information
Wafer Capacity:
Four cassettes of 8"
Eight cassettes of 4", 5" or 6"
Throughput: 200 8" or 400 6" per hour
13- 200 watt heaters
Stainless Steel HMDS Flask, 316SS float and stem level sensor.
Power Requirements 208 V 25.0 A 60 Hz 1 Phase
Condition Excellent
Exterior Dimensions
Width 39.000 in (99.1 cm)
Depth 22.000 in (55.9 cm)
Height 26.000 in (66.0 cm)
Weight 440 lb (200 kg)