Verteq IPA 2800

Wafer Size Range
Maximum 200 mm
Cassettes per Load 2
Controller Type Microprocessor Controller Type
External Cooling Water Cooled
Other Information
System will process two cassetts of wafers or devices up to 8" in diameter
System sensors and safety features

Automatic and manual operation
IPA level sensor
IPA Supply low
Cooling water flow
Cooling water temp.
Exhaust air flow loss
N2 pressure loss
Air pressure loss
DI water flow
N2 flow loss
IPA leak detector
Purity limit
IPA Fluid temp.
Fire alarm (Ultra Violet)
Extremely low emissions and alcohol comsumption
System consists of a dryer module and a auxiliary module
Water cooling chiller and vacuum pump not included.
Exhaust Requirements:
Vapor module: [email protected] static pressure (min)
Auxiliary module: [email protected] static pressure (min)
Exhaust blowers not included
Power Requirements 208 V 40.0 A 50/60 Hz 1 Phase