Verteq 1600-55M

Wafer Size Range
Maximum 150 mm
Set Size 125 mm

Controller Type Microprocessor Controller Type
Controller Model 1075227
Resistivity Monitor YES
Rotor Model 1075457-1
Cart Mounted YES
SRD Configuration Double Stack

Accessories
DTS-560M Resist Monitor.

Power Requirements 120 V 50/60 Hz 1 Phase
Condition Very Good

Exterior Dimensions
Width 20.000 in (50.8 cm)
Depth 41.000 in (104.1 cm)
Height 63.000 in (160.0 cm)
Weight 550 lb (249 kg)