Veeco Miller Design FPP-5000

Bulk resistivity of a slice with a known thickness
Thickness in, A, MILS, or microns of a slice or layer with a known bulk resistivity
RETEST button allows additional measurements without disturbing the probes
Automatically holds the last reading after the probe is released and until the next measurement is made
Error code displays indicate improper operation, readings and electronics
Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/SQ
High accuracy of 0.5% of reading on all reading between 5 milliohm to 5 k ohm
Self test circuitry built in to determine if a fault is present
Self calibration and zero circuitry assures high accuracy in all but extreme ranges
Index substrate holder allows repeatable probe positioning on the substrate
Probe up permits repeatable measurements independent of operator force and substrate thickness
Plug in probe head adaptors make probe head changing convenient and non critical
Typing mode determines N and P typing for most semiconductor substrates or layers
input power of 115/230 VAC +/- 10%, 50/60 Hz