Veeco E475 Turbodisc

System configured for AsP use
Version: 100 mm
• E475 Stainless Steel High Efficiency Growth Chamber.
• Water cooled E475 Flow Flange assembly with linear alkyl injection manifold and hydride distribution.
• Three zone resistive heater assembly with heat shields, electrical connectors and insulators.
• Veeco® Turbo disc® susceptor for wafer carriers with solid spindle.
• Integrated magnetofluidic rotation mechanism,motor,and drive assembly.
• Front view port and pass-through with pneumatic shutter.
• Water cooled base plate assembly with electrical and thermocouple feedthroughs and temperature regulation.
• Low differential pressure MFCs for alkyl and hydride distribution and standard MFC's for hydrogen shroud flow distribution.
• Pushflow MFC for inner alkyl zone.