Vector MX-1000B

○Main specifications
・Stage movement: X axis 200mm, Y axis 200mm, θ axis ±5°
・Microscope stage movement: X axis 25mm, Y axis 25mm
・Z-axis movement amount: 25mm (3mm/300um with
specified amount vertical movement lever)
・Chuck size: 8 inches (φ200mm)
・Wafer holding method: Vacuum suction method
・Prober external dimensions: Approximately W600 x D550 x H700mm
・Weight: Approximately 80kg

【Commodity composition】
・Prober body
・Metal microscope: FS70 (manufactured by Mitutoyo) Objective lens 5X, 10X, 20X, 50X, Eyepiece 10X
・Shield box with vibration isolator (external dimensions: approx. W900 x D800 x H1540mm (including protrusions) H approx. 2000mm when open Weight: approx. 220kg)
・Positioner: 2 pieces (M202C manufactured by Nippon Micronics)
・Microscope illumination: 1 piece (MEGALIGHT 100 made by SCOTT)

【utility】
・Vacuum (for chuck adsorption)
・Compressed air: 0.25MPa (for vibration isolation table)
・Power supply: AC100V (for microscope illumination)
*Compressor and vacuum pump are not included.
*Instruction manual is not included.

[Device status]
No instruction manual