AMAT, Varian E500 EHP

Wafer Size 200 mm
Fab Section Implant

General Product Information
Software Version 13.42.18
CIM GEM and SECS
Process ION IMPLANTATION SYSTEM

Hardware Confguration (Fab)
Main System Main Unit 1
Handler System Endstation PP+ with both
LOADLOCK 1

Hardware Confguration (Subfab / Auxilliary Units)
scrubber Exhaust 1 OK
Load lock rough pump 1 OK

Missing/Faulty Parts / Accesorries List
Analyzer turbo pum 1
Load lock rough pump 1
Load lock rough pump 1
source rough pump 1
source turbo pump 1
LHS and RHS turbo pump 2
Scroll pump 1
Beamline turbo pump 1