AMAT, Varian E500 EHP

Ref : 254118

Condition : Used

Manufacturer : AMAT, Varian

Model : E500 EHP

Year(s) : 2007

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Implant

General Product Information
Software Version 13.42.18
CIM GEM and SECS
Process ION IMPLANTATION SYSTEM

Hardware Confguration (Fab)
Main System Main Unit 1
Handler System Endstation PP+ with both
LOADLOCK 1

Hardware Confguration (Subfab / Auxilliary Units)
scrubber Exhaust 1 OK
Load lock rough pump 1 OK

Missing/Faulty Parts / Accesorries List
Analyzer turbo pum 1
Load lock rough pump 1
Load lock rough pump 1
source rough pump 1
source turbo pump 1
LHS and RHS turbo pump 2
Scroll pump 1
Beamline turbo pump 1

Other machines similar to AMAT, Varian E500 EHP

1 AMAT P5000 9

Location : EUROPE (Western and Northern)

Year(s) : 2012

1 AMAT P5000 MARK II

Location : AMERICA North (USA-Canada-Mexico)

Year(s) : 1996

1 AMAT Precision 5000

Location : AMERICA North (USA-Canada-Mexico)

Year(s) : 1990

1 AMAT Centura MCVD SYS5200T

Location : United States (USA)

Year(s) : 2001