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Unaxis CLC200 PVD Sputter
Ref :
2670602-9-CP
Condition :
Used
Manufacturer :
Unaxis
Model :
CLC200 PVD Sputter
Year(s) :
2005
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Number of Chambers: 6
Accessories: We sell the whole tool with all accessories
CE Marked: YES
Condition: Excellent
Chambers:
PM2 is a clean chamber an is RF Supplied
PM4 is RF and DC Power Supplied
PM1, PM3, PM5 and PM6 is DC power supplied
The exact tool model is specific defined as: Unaxis CLN200-1.
In the middle of the system you will find the
transport module MX 800 with a MagnaTran MAG 7.
A so called `Toplinger` and two cassette stations VCE6 are
further components.
The tool has 6 process chambers
One (P2) is a etch chamber (SEQ151)
The other modules (P1,P3,P4, P5 and P6) are
PVD modules (ARQ151)
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