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Ulvac FRE-200E
Ref :
2632627-9-CP
Condition :
Used
Manufacturer :
Ulvac
Model :
FRE-200E
Year(s) :
2014
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
ULVAC - XeF2 Etch Release FRE-200E
Equipment Details: RF Power supply.
Voltage: 208V Frequency: 60Hz
Phase, Wire: 3Phase, 3Wire+ G Line
Full Load Current: 142A
Max Load(unit): 15.5A
Over current protective: 250A
Short Circuit Current Rating: 5Ka
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